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FASENS-Messprotokolle: optische POLYTEC + elektrische Impedanz/GAIN-PHASE Messungen an Silizium-Strukturen

sensor frequency-analysis silicon mems resonant zno polytec resonant-frequency modalanalyse fasens bmft

BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung Frequenzanaloger Sensoren, HSG-IMIT, Villingen-Schwenningen

sensor research-project sensors sensoren silicon mems quarz bizerba bosch-sensor piezoelectric-sensors microsystems silizium fasens bmft motometer hsg-imit mikrotechnik

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