IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Fundamentals and Applications of Advanced Semiconductor Devices
Errors in Pi-Coefficients Due to the Strain Effects in Resistor Stress Sensor on (001) Silicon
Chun-Hyung CHOHo-Young CHA
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2011 Volume E94.C Issue 5 Pages 791-795

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Abstract
This work focuses on a study of strain effects in resistor stress sensors fabricated on (001) silicon and their influences on the determination of piezoresistive (pi) coefficients for the precise measurements of die stresses in electronic packages. We obtained the corrected values of the pi-coefficients by considering the strain effects, without which more than 50% discrepancies may be induced.
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© 2011 The Institute of Electronics, Information and Communication Engineers
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