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Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control

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Intelligent Data Engineering and Automated Learning - IDEAL 2009 (IDEAL 2009)

Part of the book series: Lecture Notes in Computer Science ((LNISA,volume 5788))

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Abstract

To overcome the open-loop control drawbacks of electrostatic actuated MEMS mirror, intelligent control - fuzzy logic control – is introduced in the closed-loop feedback control for the first time to improve both static and dynamic performance. Furthermore, to enhance the robustness of the mirror actuation system, variable universe adaptive fuzzy logic controller (VFLC) is introduced in the feedback control to overcome the uncertainties such as MEMS fabrication process drifting and non-ideal working conditions. VFLC in feedback control can effectively control mirror with fast switching, no or little overshoot, little vibration, and fine positioning.

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Author information

Authors and Affiliations

  1. National ASIC System Engineering Research Center, Southeast University, Nanjing, 210096, China

    Weiwei Shan

  2. Electrical and Computer Engineering Department, University of Maryland, College Park, MD 20742, USA

    Xiqun Zhu & Yuan Ma

Authors
  1. Weiwei Shan
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  2. Xiqun Zhu
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  3. Yuan Ma
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Editor information

Editors and Affiliations

  1. Escuela Politécnica Superior, Universidad de Burgos, Calle Francisco de Vitoria, S/N, Edifico C, 09006, Burgos, Spain

    Emilio Corchado

  2. School of Electrical and Electronic Engineering, University of Manchester, Sackville Street Building, Sackville Street, M60 1QD, Manchester, UK

    Hujun Yin

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© 2009 Springer-Verlag Berlin Heidelberg

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Shan, W., Zhu, X., Ma, Y. (2009). Adaptive Fuzzy Logic Controller and Its Application in MEMS Mirror Actuation Feedback Control. In: Corchado, E., Yin, H. (eds) Intelligent Data Engineering and Automated Learning - IDEAL 2009. IDEAL 2009. Lecture Notes in Computer Science, vol 5788. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-04394-9_10

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  • DOI: https://doi.org/10.1007/978-3-642-04394-9_10

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-04393-2

  • Online ISBN: 978-3-642-04394-9

  • eBook Packages: Computer ScienceComputer Science (R0)

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