Abstract
A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
Markham, H.C., Brewer, B.R.: Development of a skin for intuitive interaction with an assistive robot, Minneapolis, MN, United states, pp. 5969–5972 (2009)
Kerpa, O., Weiss, K., Worn, H.: Development of a Flexible Tactile Sensor System for a Humanoid Robot, Las Vegas, NV, United states, vol. 1, pp. 1–06 (2003)
Lee, H.-K., Chang, S.-l., Yoon, E.: A flexible polymer tactile sensor: fabrication and modular expandability for large area deployment. J. Microelectromech. Syst. 15(6), 1681–1686 (2006)
Lei, K.F., Lee, K., Lee, M.: Development of a flexible PDMS capacitive pressure sensor for plantar pressure measurement. Microelectron. Eng. 99, 1–5 (2012)
Pritchard, E., Mahfouz, M., Evans Iii, B., et al.: Flexible capacitive sensors for high resolution pressure measurement. In: Proceedings of Sensors, Lecce, pp. 1484–1487 (2008)
Hu, X., Zhang, X., Liu, M., Chen, Y., Li, P., Pei, W., Zhang, C., Chen, H.: A flexible capacitive tactile sensor array with micro structure for robotic application. Sci. China Inf. Sci. 57(12), 120204 (2014)
Hu, X., Zhang, X., Liu, M., Chen, Y., Li, P., Liu, J., Yao, Z., Pei, W., Zhang, C., Chen, H.: High precision intelligent flexible grasping front-end with CMOS interface for robots application. Sci. China Inf. Sci. 59(3), 032203 (2016)
Hotta, Y., Zhang, Y., Miki, N.: Flexible distributed capacitive sensor with encapsulated ferroelectric liquid. In: Proceedings of Micro Electro Mechanical Systems, Cancun, pp. 573–576 (2011)
Acknowledgements
The authors would like to thank National High Technology Research and Development Program of China (863) (Grant Nos. 2012AA030308, 2013AA032204, 2014AA032901) National Basic Research Program of China (Grant No. 2011CB933203) National Natural Science Foundation of China (Grant Nos. 81300803, 61327809, 61474107, 61372060, 61335010, 61275200, 61178051) Grant for Capital Clinical Application Research with Characteristics (Grant No. Z141107002514061) Chinese Academy of Sciences Focus Fund (Grant No. KJZD-EW-L11-01). Also, we want to thank CHU ZHONG YI of Beijing University of Aeronautics & Astronautics.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2017 Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Zhang, J., Cui, J., Lu, Y., Zhang, X., Hu, X. (2017). A Flexible Capacitive Tactile Sensor for Manipulator. In: Sun, F., Liu, H., Hu, D. (eds) Cognitive Systems and Signal Processing. ICCSIP 2016. Communications in Computer and Information Science, vol 710. Springer, Singapore. https://doi.org/10.1007/978-981-10-5230-9_31
Download citation
DOI: https://doi.org/10.1007/978-981-10-5230-9_31
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-5229-3
Online ISBN: 978-981-10-5230-9
eBook Packages: Computer ScienceComputer Science (R0)